ESPOO, Finland, 22nd May, 2015 – Picosun Oy, the leading provider of high quality Atomic Layer Deposition (ALD) technology for global industries, reports winning important production markets in MEMS, LED, and other III-V compound semiconductor device manufacturing.
To provide these manufacturers with always the best, most comprehensive ALD solutions, Picosun has extended its range of automatic vacuum batch sample handling systems optimized for the requirements of the abovementioned industries.
Vacuum batch loaders can be integrated with Picosun’s SEMI compliant P-300 Pro ALD tools to enable fast processing of oxides, nitrides, and metals with high throughput and yield. PICOSUN™ P-300 Pro tools with flipping option can also be combined into PICOPLATFORM™ cluster systems for automatic loading of large wafer batches without vacuum breaks between cassette stations, ALD chambers, and other clustered modules. These systems complement Picosun’s leading variety of fully automated single wafer handling options.
“The continuing success of our batch and cluster ALD tools equipped with our production-proven, SEMI compatible sample handling systems proves again the unmatched level of know-how and experience our team at Picosun has in ALD equipment design and manufacturing. Electronics industry everywhere is turning to us to find the best value added solutions to their thin film coating challenges – and we are more than pleased to provide those to them to enable the most advanced microelectronics products of today,” summarizes Mr. Timo Malinen, Chief Operations Officer of Picosun.
Picosun provides the most advanced ALD thin film technology and enables the industrial leap into the future by novel, cutting-edge coating solutions, with four decades of continuous expertise in the field. Today, PICOSUN™ ALD systems are in daily production use in numerous major industries around the world. Picosun is based in Finland, with subsidiaries in USA, China, Taiwan, and Singapore, and a world-wide sales and support network.