ESPOO, Finland, 26th November, 2015 – Picosun Oy, leading supplier of high end Atomic Layer Deposition (ALD) thin film coating solutions for global industries, launches ALD equipment for production of high efficiency 3D-integrated trench capacitors.
Capacitors are core components of every electronic device. As the trend is towards constantly miniaturizing and more and more integrated electronic modules, there is a need to develop completely new, disruptive technologies to outperform the existing solutions – especially in areas where flawless performance, long lifetime, and unfaltering reliability are required, such as in medical, space, and aviation applications. 3D-nanofabricated microelectronic components answer this challenge. In high density and high voltage 3D trench capacitors, deep trench structures coated with ultra-thin high-k oxide and metallic layers enable superior voltage and charge density properties.
Picosun’s ALD technology is well-established in production of high quality dielectrics for various microelectronic industry applications. Now, PICOSUN™ batch ALD tools optimized for the novel capacitor technology have been proven to reduce cost-of-ownership and deliver excellent uniformity and step coverage for high-k dielectrics into 3D structures.
“Industrialization of the new capacitor technology requires fast and fully automated batch ALD systems. PICOSUN™ batch ALD tools specifically designed for this purpose create an important competitive edge to our company. The ability to provide complete, turn-key solutions for cost-efficient manufacturing of the key components for the most advanced IC devices makes Picosun the choice of leading electronics manufacturers”, summarizes Juhana Kostamo, Managing Director of Picosun.
Picosun provides the most advanced ALD thin film coating technology to enable the industrial leap into the future, with high end production solutions and unmatched expertise in the field. Today, PICOSUN™ ALD equipment are in daily manufacturing use in numerous major industries around the world. Picosun is based in Finland, with subsidiaries in North America, China, Taiwan, Singapore, and Japan, and a world-wide sales and support network. For further information visit www.picosun.com
The development work for industrialization of the new capacitor technology was carried out in the European Union’s 7th Framework Program project PICS, running from September 2013 to October 2015.